Proton Implanted Single Mode Holey Vertical-Cavity Surface-Emitting Lasers

Contributing USMA Research Unit(s)

Electrical Engineering and Computer Science

Publication Date


Publication Title

2005 IEEE LEOS Annual Meeting Conference Proceedings

Document Type

Conference Proceeding


This paper presents the design, fabrication, and characterization of wedge-shaped holes in proton-implant VCSELs. CW measurements indicate this holey structure can decrease threshold current, increase maximum single mode output power, and increase the efficiency of the VCSEL. With further refinement of the wedge-shape and implant diameter, to form a more optimum radially graded index profile, greater enhancement of the single mode VCSEL output is expected.

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